Service scopes
|
inspection
|
Repair
|
retrofit
|
exchange
|
overhaul
|
|
Y
|
Y
|
Y
|
Y
|
Y
|
Lead time:14 days available
＊All robots on-site install service is available
＊lost steps detection upgrade available
＊robot test platform available
＊8”and 12” robot both ready
Job scopes description
-
T/R/Z motor refurbishment
-
All belts replacement
-
All axis lubrication
-
Pulleys gear replacement
-
Vacuum valve replacement
-
Vacuum sensor replacement
-
Vacuum rube line replacement
-
72hrs burn-in test