Service scopes
Inspection
|
Repair
|
retrofit
|
Exchange
|
overhaul
|
Y
|
Y
|
Y
|
Y
|
Y
|
Lead time:7 days available
* All robots on-site install service is available
* Lost steps detection upgrade available
* Robot test platform available
* 8” and 12” robot both ready
Job scopes description
-
T/R/Z motor refurbishment
-
All belts replacement
-
All axis lubrication
-
Pulleys gear replacement
-
Vacuum valve replacement
-
Vacuum sensor replacement
-
Vacuum tube line replacement
-
72hrs burn-in test