Service scopes
inspection
|
Repair
|
retrofit
|
exchange
|
overhaul
|
Y
|
Y
|
Y
|
Y
|
Y
|
Lead time:3 days available
* All robots on-site install service is available
* Macro of controller upgrade service available
* lost steps detection upgrade available
* any type robot configure-able
* robot test platform available
* 8” and 12 ” robot both ready
Job scopes description
Prealigner
-
T/R/Z/W motor replacement
-
All belts replacement
-
All axis lubrication
-
Prealigner interface board refurbishment
-
Harmonics gear replacement
-
Vacuum tube lin replacement
-
CCD quality measurement
-
Burn-in test
Controller