200/300mm Wafer Sorter
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300mm Wafer Sorter (SMIF type)

Enhance wafer handling Performance and Safety advanced automated solutions

Explore our Automated wafer handling solutions, designed to Simple, Friendly, cutting-edge technology. From robotic wafer transfer systems to fully integrated Equipment Front End Modules (EFEMs), various wafer/substrate handling technolgy for 50mm to 300mm wafers.

·         S4-300                                      Inches              Millimeters

             Width                                    100                     2530

             Depth                                    46                       1165

             Height                                   79                       2016

      Optional Light Tower Height        95                       2413