SMIF Arm
SMIF arm support type
Asyst type :
INX2150/2200/LPT2150/2200/LPO2200/
LPX2200/VersaPort/ALU2150/2200
Rorze Elevator (Indexer)
RE109/ RE119 /RE120 /RE201
Brooks Load port : ISE150
/ISE200/ErgoSpeed seriesSMIF arm
SMIF arm support type
Asyst type :
INX2150/2200/LPT2150/2200/LPO2200/
LPX2200/VersaPort/ALU2150/2200
Rorze Elevator (Indexer)
RE109/ RE119 /RE120 /RE201
Brooks Load port : ISE150
/ISE200/ErgoSpeed seriesSMIF arm