Equipe/PRI/Brooks Controller
Wafer Controller support type
ESC-100 / ESC-200 / ESC-201 / ESC-212 / ESC-214 ESC-218 / ESC-222 / ESC -204
ATR7 controller / ATR8 controller / Vacuum Prealigner Controller / Vac Prealigner Controller
Wafer Controller support type
ESC-100 / ESC-200 / ESC-201 / ESC-212 / ESC-214 ESC-218 / ESC-222 / ESC -204
ATR7 controller / ATR8 controller / Vacuum Prealigner Controller / Vac Prealigner Controller