100/150/200mm Wafer sorter
Inquiry
wafer Sorter
two station 150mm/200mm SMIF carrier compatible
•industry standard Equipe™/JEL OEM robotics
•smallest 200mm two stage footprint
•sub class 1 particle performance
•automation capable with SECII/GEM/HSMS
•GUI based smart builder for easy recipe development
•UPS power backup + vacuum resevoir
Specifications
dimensionssize
: 1000mmW x 1000mmD (40”W x 40”D
height: SEMI S2 900mm load height
facilitiespower
: 5A at 120V MAX
cleanlinesspwp
: ² 0.05 particles per wafer @ ³ 0.1 μm
OCRcodes:
SEMI M12, M13, BC412 barcode T7
rate: 99.998% readability on bare silicon
throughputrates
: 250wph OCR / 450wph transfer
accessibilityall
panels removable
optical mouse or trackball for user input
•industry standard Equipe™/JEL OEM robotics
•smallest 200mm two stage footprint
•sub class 1 particle performance
•automation capable with SECII/GEM/HSMS
•GUI based smart builder for easy recipe development
•UPS power backup + vacuum resevoir
Specifications
dimensionssize
: 1000mmW x 1000mmD (40”W x 40”D
height: SEMI S2 900mm load height
facilitiespower
: 5A at 120V MAX
cleanlinesspwp
: ² 0.05 particles per wafer @ ³ 0.1 μm
OCRcodes:
SEMI M12, M13, BC412 barcode T7
rate: 99.998% readability on bare silicon
throughputrates
: 250wph OCR / 450wph transfer
accessibilityall
panels removable
optical mouse or trackball for user input
