Wafer Laser Marker
Inquiry
Wafer Marking system
Standard Configuration:
1 – ATM Robot, dual paddle
1 – wafer mapping system
1 – Optical Pre-aligner
1 – OCR wafer scribe recognize system (Cognex 1721)
1 – Laser Mark MD-X1000(IR1064nm) Mark position accuracy of
+/-150μm
4 – 100/150mm Flat Stages with wafer slipping sensor
1 – System diagnostic indicators displayed on front panel
Emergency stop buttons, system key switch
and lock out
1 – Shock proof Station for Laser marking
1 – SUS frame
1 – Class #1 HEPA
1 - Backup power & Backup Vacuum reservoir
1 – Scrubber Exhaust system
1 – power, EMO and UPS monitoring hardware
1 – Industry PC, Windows XP or Windows 7 Operating system
Standard Configuration:
1 – ATM Robot, dual paddle
1 – wafer mapping system
1 – Optical Pre-aligner
1 – OCR wafer scribe recognize system (Cognex 1721)
1 – Laser Mark MD-X1000(IR1064nm) Mark position accuracy of
+/-150μm
4 – 100/150mm Flat Stages with wafer slipping sensor
1 – System diagnostic indicators displayed on front panel
Emergency stop buttons, system key switch
and lock out
1 – Shock proof Station for Laser marking
1 – SUS frame
1 – Class #1 HEPA
1 - Backup power & Backup Vacuum reservoir
1 – Scrubber Exhaust system
1 – power, EMO and UPS monitoring hardware
1 – Industry PC, Windows XP or Windows 7 Operating system
